Hollow cathode modeling: II. Physical analysis and parametric study
نویسندگان
چکیده
منابع مشابه
The T6 Hollow Cathode: Measurements and Modeling
Behavior of the xenon dispenser hollow cathode is known to be complex, exhibiting high through-anode ion emission, unusual particle energy distributions, and high plume erosion rates. A flight-type T6 hollow cathode was characterized using several diagnostic methods. Measurements involved a retarding potential analyzer, quadrupole mass spectrometer, and Langmuir probe. Far-field energy, flux, p...
متن کاملPlume Measurement and Modeling Results for a Xenon Hollow Cathode
Behavior of the xenon dispenser hollow cathode is complex, exhibiting high through-anode ion emission, unusual particle energy distributions, and high plume erosion rates. The device may find new application as an ion micro-thruster. A flight-type hollow cathode was characterized using several diagnostic methods. Measurements involved a retarding potential analyzer, quadrupole mass spectrometer...
متن کاملFlux and energy analysis of species in hollow cathode magnetron ionized physical vapor deposition of copper.
To meet the stringent requirements of interconnect metallization for sub-32 nm technologies, an unprecedented level of flux and energy control of film forming species has become necessary to further advance ionized physical vapor deposition technology. Such technology development mandates improvements in methods to quantify the metal ion fraction, the gas∕metal ion ratio, and the associated ion...
متن کاملHollow Cathode Discharge Initiation and Fast Starting Cathode
Conditioning of the insert inside a hollow cathode is believed to be important to ensure reliable discharge initiation and subsequent cathode operation. The desorption of contaminates is reported from hollow cathodes as a function of heater power to quantify cathode conditioning characteristics and identify factors that might prevent the fast initiation of a discharge. In addition to conditioni...
متن کاملLithium-Fed Hollow Cathode Theory
A theory for the single-channel hollow cathode (SCHC) that includes the relevant physical processes and predicts the operating parameters is presented. A SCHC consists of a cylindrical channel approximately ten diameters in length through which a working gas (taken as lithium vapor here) flows and exits as a plasma. A high current (1-100 A) is conducted into the channel by the plasma and to the...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2017
ISSN: 1361-6595
DOI: 10.1088/1361-6595/aa6210